TY  - JOUR

T1  - A Monte Carlo study of the kickout mechanism of boron diffusion in silicon

JO  - Journal of Applied Physics

PY  - 1996/03/01

AU  - De Souza MM

AU  - Amaratunga GAJ

ED  - 

DO  - DOI: 10.1063/1.361169

VL  - 79

IS  - 5

SP  - 2418

EP  - 2425

Y2  - 2025/04/29

ER  -